Grated Waveguide Optical Cavity for Sensing

نویسنده

  • S. V. Pham
چکیده

We demonstrate the versatility of a silicon nitride grated waveguide optical cavity as compact integrated optical sensors for (bulk) concentration detection, label-free protein sensing, and – with an integrated cantilever suspended above it – gas sensing. Keywords-integrated optics, sensing, waveguide, grating

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تاریخ انتشار 2012